SU-8-based rapid tooling for thermal roll embossing

Rapid, flexible and low-cost tooling is particularly required in replication processes especially with small and medium volume as in research labs or startups. Epoxy stamps have been used in hot embossing and injection moulding since a few years. In this work, SU-8 epoxy-based patterns were generate...

Full description

Saved in:
Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2012-11, Vol.18 (11), p.1863-1869
Main Authors: Metwally, Khaled, Robert, Laurent, Salut, Roland, Khan-Malek, Chantal
Format: Article
Language:English
Subjects:
Acoustics
Electronics and Microelectronics
Engineering
Engineering Sciences
Instrumentation
Materials
Mechanical Engineering
Micro and nanotechnologies
Microelectronics
Nanotechnology
Optics
Physics
Technical Paper
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Rapid, flexible and low-cost tooling is particularly required in replication processes especially with small and medium volume as in research labs or startups. Epoxy stamps have been used in hot embossing and injection moulding since a few years. In this work, SU-8 epoxy-based patterns were generated on silicon wafers, which were employed as stamps in hot roll embossing of cyclic-olefin-copolymer and poly-methyl-methacrylate foils using a commercial laminator. This method combines the accuracy of lithographic patterning of SU-8 resist with the mass production capability of roll embossing. The stamp fabrication process can be performed in less than a few hours using photolithography for ten to hundred micrometers feature size and electron beam lithography for the sub-micronic range.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-012-1534-9