Current driven magnetic actuation of a MEMS silicon beam in a transmission electron microscope

•First demonstration of magnetic displacement in TEM.•Complete analytical model for a MEMS silicon beam.•Model validated through static and dynamic experiments. Micro-Electro-Mechanical-System (MEMS) devices associated to Transmission Electron Microscopes (TEM) have demonstrated their high potential...

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Bibliographic Details
Published in:Ultramicroscopy 2019-02, Vol.197, p.100-104
Main Authors: Lobato-Dauzier, Nicolas, Denoual, Matthieu, Sato, Takaaki, Tachikawa, Saeko, Jalabert, Laurent, Fujita, Hiroyuki
Format: Article
Language:English
Subjects:
Electronics
Engineering Sciences
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Summary:•First demonstration of magnetic displacement in TEM.•Complete analytical model for a MEMS silicon beam.•Model validated through static and dynamic experiments. Micro-Electro-Mechanical-System (MEMS) devices associated to Transmission Electron Microscopes (TEM) have demonstrated their high potential for atomic resolution imaging of specimen while applying stress for mechanical testing. This paper introduces a novel actuation principle for the MEMS device in TEM relying on the internal magnetic field of the TEM and current flow through the device. The actuation principle is experimentally demonstrated in TEM and entirely modeled in the case of a silicon beam. The model is validated through static and dynamic experimental studies. The thermal side-effect of current flow is taken into account. The major advantages of the proposed magnetic actuation principle are the bidirectional control of the displacement of the device, the intrinsic linear displacement of the device with applied current and the potential milliNewton (mN) range force generation.
ISSN:0304-3991
1879-2723
DOI:10.1016/j.ultramic.2018.12.002