Effect of the substrate temperature during gold-copper alloys thin film deposition by magnetron co-sputtering on the dealloying process

Nanoporous gold is of great interest for many applications due to its three dimensional interconnected porosity at nanoscale. Among all currently use techniques to obtain nanoporous gold, dealloying is one of the most used method to create a well-controlled nanoporous morphology. Only few studies re...

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Bibliographic Details
Published in:Surface & coatings technology 2020-02, Vol.383, p.125220, Article 125220
Main Authors: Chauvin, Adrien, Horak, Lukas, Duverger-Nédellec, Elen, Dopita, Milan, Tessier, Pierre-Yves, El Mel, Abdel-Aziz
Format: Article
Language:English
Subjects:
Condensed Matter
Copper
Dealloying
Deposition
Gold
Gold base alloys
Magnetron sputtering
Materials Science
Microstructure
Morphology
Nanoporous gold
Nitric acid
Physics
Porosity
Residual stress
Substrates
Thin film
Thin films
X-ray scattering
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Summary:Nanoporous gold is of great interest for many applications due to its three dimensional interconnected porosity at nanoscale. Among all currently use techniques to obtain nanoporous gold, dealloying is one of the most used method to create a well-controlled nanoporous morphology. Only few studies report on the creation of nanoporous gold from alloy thin film deposited by magnetron co-sputtering. However, this deposition technique allows easy tune of the morphology at nanoscale. In this paper, we report on the creation of different morphologies of nanoporous gold obtained after dealloying in nitric acid of Au-Cu thin film deposited by magnetron co-sputtering. The influence of the substrate temperature during film deposition is studied by means of scanning electron microscopy and X-ray scattering analysis. We demonstrate the impact of the as-grown thin film morphology on the final nanoporous structure. We further explain the relationship between the different nanoporous morphologies and the residual stress on the as-grown thin film. •The deposition temperature allows fine tuning of the nanoporous morphology.•The microstructure of alloy thin films evolves with the deposition temperature.•The stress induced during the PVD deposition enhances cracking during dealloying.•The surface area of the nanoporous thin film evolves with the deposition temperature.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2019.125220