Resistivity anisotropy of tilted columnar W and W Cu thin films

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Bibliographic Details
Published in:Surface & coatings technology 2021-09, Vol.421, p.127412, Article 127412
Main Authors: El Beainou, Raya, Cote, Jean-Marc, Tissot, Vincent, Potin, Valérie, Martin, Nicolas
Format: Article
Language:English
Subjects:
Acoustics
Engineering Sciences
Materials
Mechanics
Micro and nanotechnologies
Microelectronics
Physics
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ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2021.127412