Resistivity anisotropy of tilted columnar W and W Cu thin films

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Published in:Surface & coatings technology 2021-09, Vol.421, p.127412, Article 127412
Main Authors: El Beainou, Raya, Cote, Jean-Marc, Tissot, Vincent, Potin, Valérie, Martin, Nicolas
Format: Article
Language:English
Subjects:
Acoustics
Engineering Sciences
Materials
Mechanics
Micro and nanotechnologies
Microelectronics
Physics
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container_end_page
container_issue
container_start_page 127412
container_title Surface & coatings technology
container_volume 421
creator El Beainou, Raya
Cote, Jean-Marc
Tissot, Vincent
Potin, Valérie
Martin, Nicolas
description
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source ScienceDirect Journals
subjects Acoustics
Engineering Sciences
Materials
Mechanics
Micro and nanotechnologies
Microelectronics
Physics
title Resistivity anisotropy of tilted columnar W and W Cu thin films
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