Importance of layer distribution in Ni and Au based ohmic contacts to p-type GaN

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Bibliographic Details
Published in:Microelectronic engineering 2023-05, Vol.277
Main Authors: Mauduit, Clément, Tlemcani, Taoufik Slimani, Zhang, Meiling, Yvon, Arnaud, Vivet, Nicolas, Charles, Matthew, Gwoziecki, Romain, Alquier, Daniel
Format: Article
Language:English
Subjects:
Engineering Sciences
Materials
Micro and nanotechnologies
Microelectronics
Physics
Online Access:Get full text
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ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2023.112020