Spectroscopic ellipsometry characterization of ZnO–In2O3 systems

The pseudobinary oxides of zinc-indium-oxide systems (ZnO–In2O3) with high conductivity and transparency were the subjectof this work. The films were prepared on heated glass substrates by spray pyrolytic decomposition of zinc chloride with indiumchloride in distilled water. The spectroscopic ellips...

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Bibliographic Details
Published in:Thin solid films 2004-05, Vol.455-456, p.384-387
Main Authors: El Rhaleb, H., En Naciri, A., Dounia, R., Johann, L., Hakam, A., Addou, M.
Format: Article
Language:English
Subjects:
Physics
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Summary:The pseudobinary oxides of zinc-indium-oxide systems (ZnO–In2O3) with high conductivity and transparency were the subjectof this work. The films were prepared on heated glass substrates by spray pyrolytic decomposition of zinc chloride with indiumchloride in distilled water. The spectroscopic ellipsometry and atomic force microscopy (AFM) were used to analyze the optical properties and the surface structures of ZnO–In2O3 films deposited. The ellipsometric parameters tanc and cosD were measured using a rotating polarizer spectroscopic ellipsometer in the wavelength range (0.4–1.5 mm) at two incident angles of 65 and 708.The layer roughness was modeled as an effective mixture of 50% ZnO–In2O3 and 50% voids in good agreement with the direct AFM measurement. The complex refractive index and electrical resistivity for several wZnxy wZnqInx ratios (at.%) were determined and analyzed.
ISSN:0040-6090
DOI:10.1016/j.tsf.2004.01.061