Ultrahigh vacuum Raman spectroscopy for the preparation of III–V semiconductor surfaces

• Published in: Review of scientific instruments 2023, Vol.94 (12)
• Main Authors: Khelifi, Wijden, Canneson, Damien, Berthe, Maxime, Legendre, Sébastien, Coinon, Christophe, Desplanque, Ludovic, Wallart, Xavier, Biadala, Louis, Grandidier, Bruno, Capiod, Pierre
• Format: Article
• Language: English
• Subjects: Chemical Physics; Instrumentation and Detectors; Physics
• ISSN: 0034-6748; 1089-7623
• DOI: 10.1063/5.0152031

Raman spectroscopy is well-suited for the characterization of semiconductor materials. However, due the weakness of the Raman signal, the studies of thin semiconductor layers in complex environments, such as ultrahigh vacuum, are rather scarce. Here, we have designed a Raman apparatus based on the use of a fiber optic probe, with a lens collecting the backscattered light directly inserted in ultrahigh vacuum. The solution has been tested for the preparation of III–V semiconductor surfaces, which requires the recovery of their atomic reconstruction. The surfaces were either protected with a thin As amorphous layer or covered with a native oxide prior to their treatment. The analysis of the Raman spectra, which was correlated with the study of the surfaces with low temperature scanning tunneling microscopy at the end of the cleaning process, shows the high potential of Raman spectroscopy for monitoring the cleanliness of III–V semiconductor heterostructures in situ.