Development of an industrial tool to make passivation layers for UV sensors improvement

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Bibliographic Details
Published in:Applied surface science 2012-09, Vol.258 (23), p.9270-9273
Main Authors: Larmande, Yannick, Vervisch, Vanessa, Delaporte, Philippe, Sarnet, Thierry, Sentis, Marc, Etienne, Hasnaa, Torregrosa, Frank
Format: Article
Language:English
Subjects:
Engineering Sciences
Online Access:Get full text
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ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2012.02.054