Field modulation micro coils for magneto-optical recording

Summary form only given. A magnetic field modulation (MFM) coil with a magnetic core is described for advanced magneto-optical recording technologies of 50-100 Gb/in/sup 2/. This MFM coil is fabricated on a Si substrate by thin film process technologies for Si etching and the magnetic multilayered c...

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Bibliographic Details
Main Authors: Sugawara, E., Wako, N., Satoh, M., Suzuki, H., Shirakawa, K., Masumoto, T.
Format: Conference Proceeding
Language:English
Subjects:
Chemical lasers
Chemical technology
Coils
Etching
Magnetic cores
Magnetic films
Magnetic force microscopy
Magnetic modulators
Magnetooptic recording
Substrates
Online Access:Request full text
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Description
Summary:Summary form only given. A magnetic field modulation (MFM) coil with a magnetic core is described for advanced magneto-optical recording technologies of 50-100 Gb/in/sup 2/. This MFM coil is fabricated on a Si substrate by thin film process technologies for Si etching and the magnetic multilayered core. Three holes are chemically etched in the Si substrate as contact holes and laser light hole. The magnetic core, consisting of a CoFeSiB/SiO/sub 2/ composite multi-layered film, is applicable to MFM coils.
DOI:10.1109/INTMAG.2002.1001453