A Resonant High-Pressure Microsensor Based on the Vertical Dual Resonators With Oil-Filled Isolated Structure

This letter developed a resonant high-pressure microsensor with a measurement range of 30 MPa based on a vertical distribution of dual resonators and an oil-filled structure. More specifically, dual resonators were vertically deployed in an H-cavity and were subjected to compressive and tensile stre...

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Bibliographic Details
Published in:IEEE electron device letters 2023-03, Vol.44 (3), p.508-511
Main Authors: Yu, Jie, Yu, Zongze, Lu, Yulan, Xie, Bo, Chen, Deyong, Wang, Junbo, Chen, Jian
Format: Article
Language:English
Subjects:
Cavity resonators
Compressive properties
H-cavity
High pressure
MEMS
Microsensors
oil-filled isolated structure
Pressure measurement
resonant high-pressure microsensor
Resonators
Sensitivity
Sensors
Temperature measurement
Temperature sensors
Vertical distribution
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Summary:This letter developed a resonant high-pressure microsensor with a measurement range of 30 MPa based on a vertical distribution of dual resonators and an oil-filled structure. More specifically, dual resonators were vertically deployed in an H-cavity and were subjected to compressive and tensile stresses under applied pressures while the sensing unit was surrounded by silicon oil and sealed by a corrugated diaphragm structure and a base house for hydraulic measurements. Microfabrication was conducted to fabricate the microsensor and the pressure sensitivities were quantified as 0.135 kHz/MPa (~2103 ppm/MPa) of Resonator I, −0.085 kHz/MPa (~-1358 ppm/MPa) of Resonator II, and 0.219 kHz/MPa (~3461 ppm/MPa) of the differential output of the dual resonators under 20°C, producing fitting and measurement accuracies of 0.01%FS under a pressure range of 0.11-30 MPa and a temperature range of −10-60°C. This study provided a new perspective in the field of high-pressure measurements in harsh environments with high accuracies and sensitivities.
ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2023.3237272