ON-MEMS-CHIP Compact Temperature Sensor for Large-Volume, Low-Cost Sensor Calibration

The work introduces a MEMS temperature sensor for use in the same module of other sensors, to provide optimal measurements for their thermal calibration/compensation purposes. The sensor, made of 25-μm-thick, lowly-doped, epitaxial polysilicon, relies on a multi-mode resonator, where the frequency r...

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Bibliographic Details
Main Authors: Frigerio, Paolo, Fagnani, Andrea, Zega, Valentina, Gattere, Gabriele, Frangi, Attilio, Langfelder, Giacomo
Format: Conference Proceeding
Language:English
Subjects:
Mechanical sensors
MEMS
Micromechanical devices
multi-mode resonators
Resonant frequency
Sensor systems
temperature coefficient of frequency
Temperature measurement
Temperature sensors
Time-frequency analysis
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Description
Summary:The work introduces a MEMS temperature sensor for use in the same module of other sensors, to provide optimal measurements for their thermal calibration/compensation purposes. The sensor, made of 25-μm-thick, lowly-doped, epitaxial polysilicon, relies on a multi-mode resonator, where the frequency ratio is used to extract relative temperature changes without the need of an external absolute time reference. Measurements across the [5-85]°C range validate the predictions of the frequency behavior, enabling to estimate ±50 mK rms resolution at 4-Hz data rate.
ISSN:2160-1968
DOI:10.1109/MEMS49605.2023.10052513