Implementation of a Monolithic SoC Environmental Sensing Hub Using CMOS-MEMS Technique

This study demonstrates a novel monolithic environmental sensing hub using CMOS MEMS processes. Merits of the proposed design are: (1) SoC environmental sensing hub monolithically integrated the gas sensor, anemometer, humidity sensor, visible light sensor and thermometer on a single chip, and (2) t...

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Bibliographic Details
Main Authors: Lee, Ya-Chu, Chien, Tung-Lin, Fang, Chi-Te, Huang, Yuanyuan, Sung, Wei-Lun, Chu, Yen-Chang, Chen, Rongshun, Fang, Weileun
Format: Conference Proceeding
Language:English
Subjects:
Anemometer
CMOS-MEMS
Environment sensing hub
Fluid flow measurement
Gas sensor
Humidity
Humidity sensor
Micromechanical devices
Semiconductor device measurement
Sensitivity
Thermometer
Thermometers
Visible light sensor
Wavelength measurement
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Summary:This study demonstrates a novel monolithic environmental sensing hub using CMOS MEMS processes. Merits of the proposed design are: (1) SoC environmental sensing hub monolithically integrated the gas sensor, anemometer, humidity sensor, visible light sensor and thermometer on a single chip, and (2) the compatibility of post-CMOS processes to implement a SoC environment sensing hub. The environmental sensing hub has been successfully implemented using TSMC 0.18μm 1P6M CMOS process and in-house post-process. Measurement results show that sensitivities of gas sensor, anemometer, humidity sensor and thermometer are respectively 0.057 %/% (O 2 ), 0.5 Ω/ms-1, 1.6 pF/%RH and 0.6307 mV/ºC. The sensitivities of visible-light sensor for each wavelength are 2.47 mV/µW (443 nm), 5.21 mV/µW (522 nm) and 8.94 mV/µW (634 nm). The fabricated environmental sensing hub reveals the highly integrated monolithic CMOS-MEMS system-on-chip (SoC) applications.
ISSN:2160-1968
DOI:10.1109/MEMS49605.2023.10052584