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Shielding considerations of 25 kW RF power source for FAF CO/sub 2/ laser
A 25 kW RF power source operating at 13.56 MHz to excite RF discharge in fast axial flow (FAF) CO/sub 2/ laser was developed. The power source is part of the laser system that is being operated in an industrial environment and is used for industrial applications. The various sources of EMI and their...
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Main Authors: | , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | A 25 kW RF power source operating at 13.56 MHz to excite RF discharge in fast axial flow (FAF) CO/sub 2/ laser was developed. The power source is part of the laser system that is being operated in an industrial environment and is used for industrial applications. The various sources of EMI and their coupling paths of this power source are investigated and control/suppression measures for EMI are discussed. |
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DOI: | 10.1109/ICEMIC.2002.1006457 |