Studying the Impact of Temperature Gradient on Electromigration Lifetime Using a Power Grid Test Structure with On-Chip Heaters

This work presents statistical data collected from 38 power grid test structures showing the detailed impact of temperature gradient on electro migration (EM) lifetime. The failure time, order, and location under different temperature gradients were compared to show that unexpected early EM failures...

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Bibliographic Details
Main Authors: Yi, Yong Hyeon, Kim, Chris, Zhou, Chen, Kteyan, Armen, Sukharev, Valeriy
Format: Conference Proceeding
Language:English
Subjects:
Electromigration
Heating systems
Metals
on-chip heater
power grid
Power grids
reliability
Temperature distribution
temperature gradient
Tensile stress
TTF
void
Wires
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Description
Summary:This work presents statistical data collected from 38 power grid test structures showing the detailed impact of temperature gradient on electro migration (EM) lifetime. The failure time, order, and location under different temperature gradients were compared to show that unexpected early EM failures can occur at temperature gradient regions due to accelerated tensile stress evolution inside the wire.
ISSN:1938-1891
DOI:10.1109/IRPS48203.2023.10117811