Protection Schemes for Plasma Induced Damage from Well-Side Antennas

In this paper, several protection schemes for the plasma-induced damage (PID) from well-side antennas are proposed. The PID protection components made of diodes or ESD-like clamps are used to either balance the potentials between the wells or clamp the gate-to-source voltages of the victim gates. Th...

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Bibliographic Details
Main Authors: Kuo, Hsi-Yu, Chu, Yu-Lin, Dai, Hung-Da, Wang, Chun-Chi, Lin, Pei-Jung, Guo, Ethan, Su, Yu-Ti, Hsu, Chia-Lin, Chen, Kuan-Hung, Chen, Tsung-Yuan, Lu, Ryan, Liang, Victor, Chen, Kuo-Ji, Xia, Kejun
Format: Conference Proceeding
Language:English
Subjects:
Clamps
Cross-domain interface
DNW
Electric potential
Logic gates
Metals
MOSFET
NBL
PID
Plasmas
Routing
Well Charging
Well-side antennas
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Summary:In this paper, several protection schemes for the plasma-induced damage (PID) from well-side antennas are proposed. The PID protection components made of diodes or ESD-like clamps are used to either balance the potentials between the wells or clamp the gate-to-source voltages of the victim gates. These protection schemes and the way to insert protection components have been verified by a variety of test structures designed in a 0.13µm BCD (Bipolar-CMOS-DMOS) process where NBL (N-type Buried Layer) is used as the isolation well.
ISSN:1938-1891
DOI:10.1109/IRPS48203.2023.10117947