Research on the fabrication of ultra-sensitive Fabry-Pérot pressure sensor based on dip-coating method

To effectively control the thickness of polymer diaphragms and enhance the sensitivity of the Fabry-Pérot pressure sensor, the research of the relevant parameters based on the dip-coating method is carried out. By experimentally investigating the relationship between the immersion depth and dipping...

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Bibliographic Details
Published in:IEEE sensors journal 2023-06, p.1-1
Main Authors: Zhao, Yanjin, Song, Ningfang, Xu, Xiaobin, Gao, Fuyu
Format: Article
Language:English
Subjects:
Curing
dip-coating method
Fabry–Pérot pressure sensor
Optical fiber sensors
PDMS polymer diaphragm
Polymers
Pressure sensors
Sensitivity
Sensors
Viscosity
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Summary:To effectively control the thickness of polymer diaphragms and enhance the sensitivity of the Fabry-Pérot pressure sensor, the research of the relevant parameters based on the dip-coating method is carried out. By experimentally investigating the relationship between the immersion depth and dipping time, solution viscosity, dipping angle, lifting speed, and dipping speed, respectively, the effect of the intracavity pressure on the thickness of diaphragm formation is found to be predominant. Extremely thin diaphragm thicknesses can be obtained by controlling the dipping parameters when the hollow-core fiber is immersed in the PDMS polymer solution. Experimental results show that the optimized diaphragm thickness can be reduced to 4.9μm. Correspondingly, the Fabry-Pérot pressure sensor has a sensitivity of up to 5.01nm/kPa, which is about two times that reported in previous studies.
ISSN:1530-437X
DOI:10.1109/JSEN.2023.3281778