Design and Performance of Fiber Vibration Sensor Based on Fabry-Perot Structures with Microbubble

Micro-bubble Fabry-Perot optical fiber vibration sensor has been proposed and used for monitoring the external vibration through its unique ultra-thin silicon film. The vibration signal deforms the silicon film and changes the intensity of reflected light, so as to establish their depending relation...

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Bibliographic Details
Published in:IEEE sensors journal 2023-08, Vol.23 (15), p.1-1
Main Authors: Wang, Yan-Nan, Li, Jin, Meng, Fanli
Format: Article
Language:English
Subjects:
Acoustic sensor
Discharges (electric)
Fabry-Perot
Fabry-Perot interferometer
Fabry-Perot interferometers
Frequency response
Luminous intensity
Optical fiber sensor
Optical fiber sensors
Optical fibers
Sensitivity
Sensors
Silicon films
Static pressure
Vibration monitoring
Vibration sensor
Vibrations
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Summary:Micro-bubble Fabry-Perot optical fiber vibration sensor has been proposed and used for monitoring the external vibration through its unique ultra-thin silicon film. The vibration signal deforms the silicon film and changes the intensity of reflected light, so as to establish their depending relationship. In this paper, the fabrication method of micro-bubble Fabry-Perot optical fiber vibration sensing probe, as well as the flexible adjustment method of Fabry-Perot cavity length are analyzed and discussed. By comparing the frequency response of micro-bubble cavity structures with different parameters, the influence law of the cavity morphology on the vibration sensing performance has been studied. The designed vibration sensor based on the micro-bubble Fabry-Perot interference cavity has the small size, compact structure and high sensitivity, which is suitable for real-time monitoring of static pressure and dynamic vibration in complex environment, such as narrow space. This work can provide some theoretical and technical reference for developing the miniature vibration sensor devices with high-performance.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2023.3288084