Micromachined coplanar waveguide on GaAs based HFET heterostructures

The design, fabrication and characterization of microwave transmission structures on thin composite semiconductor/dielectric substrates, technologically compatible with pseudomorphic HFETs, for micromechanical microwave transmitted power sensors are discussed. The AlGaAs/InGaAs/GaAs and InGaP/InGaAs...

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Bibliographic Details
Main Authors: Tomaska, M., Lalinsky, T., Krnac, M., Klasovity, M., Mozolova, Z., Hascik, S., Kostic, I.
Format: Conference Proceeding
Language:English
Subjects:
Coplanar waveguides
Dielectric substrates
Fabrication
Gallium arsenide
HEMTs
Indium gallium arsenide
Micromechanical devices
Microwave technology
MODFETs
Semiconductor waveguides
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Summary:The design, fabrication and characterization of microwave transmission structures on thin composite semiconductor/dielectric substrates, technologically compatible with pseudomorphic HFETs, for micromechanical microwave transmitted power sensors are discussed. The AlGaAs/InGaAs/GaAs and InGaP/InGaAs/GaAs HFET structures as supporting layers of micromachined coplanar waveguides for low loss microwave power transmission are compared.
DOI:10.1109/MIKON.2002.1017965