Integrated niobium thin film air bridges as variable capacitors for GHz tuning circuits

Saved in:
Bibliographic Details
Main Authors: Schicke, M., Schuster, K.-F.
Format: Conference Proceeding
Language:English
Subjects:
Bridge circuits
Capacitance
Capacitors
Circuit optimization
Electronic circuits
Fabrication
Niobium
Resists
Superconducting filters
Thin film circuits
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:1155-4339
DOI:10.1109/WOLTE.2002.1022477