Synthesis and Fabrication of Hafnium Zirconium Oxide (HZO) /P(VDF-TrFE) Flexible Piezoelectric Composite Films

This paper presents the synthesis and fabrication of Hafnium zirconium oxide/Polyvinylidene Fluoride-Trifluoroethylene (HZO/P(VDF-TrFE)) flexible piezoelectric films. Metallo-organic decomposition method from a low-toxicity chemical solution was used for synthesis of Hf 0.5 Zr 0.5 O 2 particles in c...

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Main Authors: Taleb, Sepide, Badillo, Miguel, Acuautla, Monica
Format: Conference Proceeding
Language:English
Subjects:
energy harvester
Fabrication
flexible piezoelectric
Hafnium
Hafnium zirconium oxide
P(VDF-TrFE)
Piezoelectric films
Resonant frequency
Sensitivity
Wearable computers
Zirconium
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Badillo, Miguel
Acuautla, Monica
description This paper presents the synthesis and fabrication of Hafnium zirconium oxide/Polyvinylidene Fluoride-Trifluoroethylene (HZO/P(VDF-TrFE)) flexible piezoelectric films. Metallo-organic decomposition method from a low-toxicity chemical solution was used for synthesis of Hf 0.5 Zr 0.5 O 2 particles in cubic+monoclinic phase. Addition of 5 wt% of such particles into P(VDF-TrFE) matrix increases the d 33 coefficient, the dielectric constant, and the sensitivity of the films. Compared to a cantilever energy harvesting system made with pure P(VDF-TrFE), the 5 wt% HZO composite cantilever produces 67.6% and 122% higher output voltage at first and second resonance frequency, respectively. These interesting results are promising for future low frequency applications, such as wearable devices, based on non-toxic and sensitive ferroelectric/piezoelectric composites with hafnium and zirconium-based oxides.
doi_str_mv 10.1109/ISAF53668.2023.10265513
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subjects energy harvester
Fabrication
flexible piezoelectric
Hafnium
Hafnium zirconium oxide
P(VDF-TrFE)
Piezoelectric films
Resonant frequency
Sensitivity
Wearable computers
Zirconium
title Synthesis and Fabrication of Hafnium Zirconium Oxide (HZO) /P(VDF-TrFE) Flexible Piezoelectric Composite Films
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