A Self-Sustained Phononic Comb MEMS Oscillator with Loop Phase Tuning

SummaryThis work investigates a self-sustained phononic comb Micro-Electro-Mechanical Systems (MEMS) oscillator with comb control by using loop phase tuning. The formation of the phononic combs in this work is carried out through a self-oscillation (closed-loop) at the nonlinear state of a piezoelec...

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Bibliographic Details
Main Authors: Chang, Chin-Yu, Liu, Chun-You, Li, Sheng-Shian
Format: Conference Proceeding
Language:English
Subjects:
Amplifiers
Harmonic analysis
Microelectromechanical systems
Micromechanical devices
nonlinear MEMS
Phase locked loops
Phononic frequency combs
Resonant frequency
Time-frequency analysis
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Summary:SummaryThis work investigates a self-sustained phononic comb Micro-Electro-Mechanical Systems (MEMS) oscillator with comb control by using loop phase tuning. The formation of the phononic combs in this work is carried out through a self-oscillation (closed-loop) at the nonlinear state of a piezoelectric flexure mode resonator without any external parametric pumping. We experimentally confirm the tunability of the phononic combs by adjusting the loop phase (θ T ) of the Phase Lock Loop (PLL) in the lock-in amplifier at various oscillation points. The first two eigenmodes of the fully clamped thin-film resonator are adopted to demonstrate the proposed mechanism. Each of the eigenmodes is successfully sustained for oscillation by the use of the lock-in amplifier, thus featuring different phononic comb states. The achievement in this work could be further extended to frequency comb-based sensor technologies.
ISSN:2327-1949
DOI:10.1109/EFTF/IFCS57587.2023.10272115