Development of a robust low-cost system for substrate preparation and growth of high quality MoS2 thin films

• Main Authors: Assahi, Flavio, Ider, Joao, Oliveira, Adhimar, Rubinger, Carla, Rubinger, Rero
• Format: Conference Proceeding
• Language: English
• Subjects: component; formatting; insert; Ovens; Production; Resists; Scanning electron microscopy; style; styling; Three-dimensional displays; Two dimensional displays; X-ray scattering
• ISSN: 2832-420X
• DOI: 10.1109/SBMicro60499.2023.10302520

Two-dimensional materials have a significant increase in toughness and mechanical properties and, due to the two-dimensional confinement, it presents an excellent performance in electrical and thermal aspects. Among the two-dimensional materials, molybdenum disulfide (MoS 2 ) has been attracting the attention of researchers due to its high absorbance in the infrared region and the changes in electrical and thermoelectric properties in its gap when changing from 2D to 3D. For the production of MoS 2 , the fused quartz glass substrates were subjected to previous ultraviolet treatment used to allow the deposited layers to resist wear by contact. For this, it was designed and built using a UV/Ozone treatment chamber. After substrate treatment, the MoS 2 layers were grown using a chemical vapor deposition oven with controlled temperature and inert atmosphere to avoid contamination by other elements. The samples were characterized by Scanning Electron Microscopy (SEM) and X-Ray Diffraction (XRD) methods. The results show that the MoS 2 thin film was obtained, which is promising for the development of new devices for use in thermogenerators.