Monolithic Silicon Photonics

This paper details a monolithic approach to the integration of photonic systems. Polarization diverse photonic components are fabricated in a 45nm silicon-on-insulator microelectronics process flow which includes digital and RFCMOS, high performance analog mixed signal, mmWave components, electro-th...

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Bibliographic Details
Main Authors: Letavic, T., Sorbara, Massimo, Geiwont, Ken, Bian, Yusheng, Jain, Vihbor, Jain, Sameer, Ramachandran, Koushik, Wu, Zhuo-Jie, Hedrick, Brittany, Dezfulian, Kevin K., Lin, Yarong, Tang, Teck Jung, Houghton, Thomas, Fisher, Daniel, Hirokawa, Takako, Esopi, Monica, Karra, Vaishnavi, Lee, Won Suk, Zhang, Michelle, Lubguban, Ryan Sporer Jorge, Cho, Jae Kyu, Cao, Rongtao, Ding, Hanyi, Chandran, Sujith, Rakowski, Michal, Aboketaf, Abdelsalam, Krishnamurthy, Subramanian, Mills, Scott, Robson, Norman, Melville, Ian, Fox, Robert, Gupta, Vikas, Yu, Anthony
Format: Conference Proceeding
Language:English
Subjects:
mmWave RFCMOS
Monolithic CMOS
Optical device fabrication
Optical fiber polarization
Optical polarization
Optical variables measurement
Silicon Photonics
System integration
Transceivers
Wavelength division multiplexing
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Summary:This paper details a monolithic approach to the integration of photonic systems. Polarization diverse photonic components are fabricated in a 45nm silicon-on-insulator microelectronics process flow which includes digital and RFCMOS, high performance analog mixed signal, mmWave components, electro-thermal and electro-optic control elements, and fiber and laser attach. This results in a single chip optical transceiver solution.
ISSN:2831-4999
DOI:10.1109/BCICTS54660.2023.10310983