Galvanometric silicon scanning mirror of 2 DOF

A large scanning mirror is fabricated and tested, with two rotational axes. Galvanometric operation is adopted for large torque with small power. Two independent current paths produce torque by Lorentz force in the external magnetic field. The external magnetic field is applied by permanent magnet b...

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Bibliographic Details
Main Authors: Si-Hong Ahn, Yong-Kweon Kim
Format: Conference Proceeding
Language:English
Subjects:
Aluminum
Lorentz covariance
Magnetic fields
Magnetic resonance
Mirrors
Optical polymers
Permanent magnets
Silicon
Springs
Torque
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Description
Summary:A large scanning mirror is fabricated and tested, with two rotational axes. Galvanometric operation is adopted for large torque with small power. Two independent current paths produce torque by Lorentz force in the external magnetic field. The external magnetic field is applied by permanent magnet beneath the device. The size of movable frame is 5.7 mm /spl times/ 5.7 mm and that of mirror 3.5 mm /spl times/ 3.5 mm. The mirror shows resonance at 380 Hz and the movable frame at 150 Hz. In resonance mode, rotation angle of mirror is 5.44/spl deg/ by applied AC current of 30 mA. In the case of movable frame 51.34/spl deg/ is obtained by applied AC current of 130 mA.
DOI:10.1109/OMEMS.2002.1031456