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Galvanometric silicon scanning mirror of 2 DOF

A large scanning mirror is fabricated and tested, with two rotational axes. Galvanometric operation is adopted for large torque with small power. Two independent current paths produce torque by Lorentz force in the external magnetic field. The external magnetic field is applied by permanent magnet b...

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Main Authors:	Si-Hong Ahn, Yong-Kweon Kim
Format:	Conference Proceeding
Language:	English
Subjects:	Aluminum Lorentz covariance Magnetic fields Magnetic resonance Mirrors Optical polymers Permanent magnets Silicon Springs Torque
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creator	Si-Hong Ahn Yong-Kweon Kim
description	A large scanning mirror is fabricated and tested, with two rotational axes. Galvanometric operation is adopted for large torque with small power. Two independent current paths produce torque by Lorentz force in the external magnetic field. The external magnetic field is applied by permanent magnet beneath the device. The size of movable frame is 5.7 mm /spl times/ 5.7 mm and that of mirror 3.5 mm /spl times/ 3.5 mm. The mirror shows resonance at 380 Hz and the movable frame at 150 Hz. In resonance mode, rotation angle of mirror is 5.44/spl deg/ by applied AC current of 30 mA. In the case of movable frame 51.34/spl deg/ is obtained by applied AC current of 130 mA.
doi_str_mv	10.1109/OMEMS.2002.1031456
format	conference_proceeding
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Galvanometric operation is adopted for large torque with small power. Two independent current paths produce torque by Lorentz force in the external magnetic field. The external magnetic field is applied by permanent magnet beneath the device. The size of movable frame is 5.7 mm /spl times/ 5.7 mm and that of mirror 3.5 mm /spl times/ 3.5 mm. The mirror shows resonance at 380 Hz and the movable frame at 150 Hz. In resonance mode, rotation angle of mirror is 5.44/spl deg/ by applied AC current of 30 mA. In the case of movable frame 51.34/spl deg/ is obtained by applied AC current of 130 mA.</description><identifier>ISBN: 9780780375956</identifier><identifier>ISBN: 0780375955</identifier><identifier>DOI: 10.1109/OMEMS.2002.1031456</identifier><language>eng</language><publisher>IEEE</publisher><subject>Aluminum ; Lorentz covariance ; Magnetic fields ; Magnetic resonance ; Mirrors ; Optical polymers ; Permanent magnets ; Silicon ; Springs ; Torque</subject><ispartof>IEEE/LEOS International Conference on Optical MEMs, 2002, p.87-88</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1031456$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,4036,4037,27902,54895</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1031456$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Si-Hong Ahn</creatorcontrib><creatorcontrib>Yong-Kweon Kim</creatorcontrib><title>Galvanometric silicon scanning mirror of 2 DOF</title><title>IEEE/LEOS International Conference on Optical MEMs</title><addtitle>OMEMS</addtitle><description>A large scanning mirror is fabricated and tested, with two rotational axes. Galvanometric operation is adopted for large torque with small power. Two independent current paths produce torque by Lorentz force in the external magnetic field. The external magnetic field is applied by permanent magnet beneath the device. The size of movable frame is 5.7 mm /spl times/ 5.7 mm and that of mirror 3.5 mm /spl times/ 3.5 mm. The mirror shows resonance at 380 Hz and the movable frame at 150 Hz. In resonance mode, rotation angle of mirror is 5.44/spl deg/ by applied AC current of 30 mA. In the case of movable frame 51.34/spl deg/ is obtained by applied AC current of 130 mA.</description><subject>Aluminum</subject><subject>Lorentz covariance</subject><subject>Magnetic fields</subject><subject>Magnetic resonance</subject><subject>Mirrors</subject><subject>Optical polymers</subject><subject>Permanent magnets</subject><subject>Silicon</subject><subject>Springs</subject><subject>Torque</subject><isbn>9780780375956</isbn><isbn>0780375955</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2002</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><recordid>eNotj81qwzAQhAWh0JD6BdqLXsCufrJa61jSJC0k-NDkHGR5XVRsuUih0LevoRkG5jvNMIw9SlFJKexzc9wePyolhKqk0HINZsEKi7WYrREsmHtW5PwlZmkLFu2SVXs3_Lg4jXRNwfMchuCnyLN3MYb4yceQ0pT41HPFX5vdA7vr3ZCpuOWKnXfb0-atPDT7983LoQwS4Vo6jZ1QiiRajwpci07hvE_akV5D38kZAYDq3tbk0ZuO2hbqzrQajJF6xZ7-ewMRXb5TGF36vdxe6T_HHUFd</recordid><startdate>2002</startdate><enddate>2002</enddate><creator>Si-Hong Ahn</creator><creator>Yong-Kweon Kim</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>2002</creationdate><title>Galvanometric silicon scanning mirror of 2 DOF</title><author>Si-Hong Ahn ; Yong-Kweon Kim</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-a37d022e179c725ab7a27956e3ae345fd16e3555e8f98ec7c6debb58d6b356613</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Aluminum</topic><topic>Lorentz covariance</topic><topic>Magnetic fields</topic><topic>Magnetic resonance</topic><topic>Mirrors</topic><topic>Optical polymers</topic><topic>Permanent magnets</topic><topic>Silicon</topic><topic>Springs</topic><topic>Torque</topic><toplevel>online_resources</toplevel><creatorcontrib>Si-Hong Ahn</creatorcontrib><creatorcontrib>Yong-Kweon Kim</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Si-Hong Ahn</au><au>Yong-Kweon Kim</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Galvanometric silicon scanning mirror of 2 DOF</atitle><btitle>IEEE/LEOS International Conference on Optical MEMs</btitle><stitle>OMEMS</stitle><date>2002</date><risdate>2002</risdate><spage>87</spage><epage>88</epage><pages>87-88</pages><isbn>9780780375956</isbn><isbn>0780375955</isbn><abstract>A large scanning mirror is fabricated and tested, with two rotational axes. Galvanometric operation is adopted for large torque with small power. Two independent current paths produce torque by Lorentz force in the external magnetic field. The external magnetic field is applied by permanent magnet beneath the device. The size of movable frame is 5.7 mm /spl times/ 5.7 mm and that of mirror 3.5 mm /spl times/ 3.5 mm. The mirror shows resonance at 380 Hz and the movable frame at 150 Hz. In resonance mode, rotation angle of mirror is 5.44/spl deg/ by applied AC current of 30 mA. In the case of movable frame 51.34/spl deg/ is obtained by applied AC current of 130 mA.</abstract><pub>IEEE</pub><doi>10.1109/OMEMS.2002.1031456</doi><tpages>2</tpages></addata></record>
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identifier	ISBN: 9780780375956
ispartof	IEEE/LEOS International Conference on Optical MEMs, 2002, p.87-88
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language	eng
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source	IEEE Electronic Library (IEL) Conference Proceedings
subjects	Aluminum Lorentz covariance Magnetic fields Magnetic resonance Mirrors Optical polymers Permanent magnets Silicon Springs Torque
title	Galvanometric silicon scanning mirror of 2 DOF
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