Transfer-printing of GeSn membranes for broadband photodetection in the extended short-wave infrared

Photodetectors based on transfer-printed GeSn membranes are demonstrated with a cutoff wavelength of about 3 µm at room-temperature. Using an adhesive layer and a Sn content of 11 at.%, GeSn membranes can be transferred without membrane bowing.

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Bibliographic Details
Main Authors: Lemieux-Leduc, C., Atalla, M. R. M., Assali, S., Daoust, P., Daligou, G., Brodeur, J., Kena-Cohen, S., Peter, Y.-A., Moutanabbir, O.
Format: Conference Proceeding
Language:English
Subjects:
Bonding
Broadband communication
Fabrication
GeSn
hybrid integration
Lattices
membranes
Photodetectors
Photonics
Strain
transfer printing
Online Access:Request full text
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Description
Summary:Photodetectors based on transfer-printed GeSn membranes are demonstrated with a cutoff wavelength of about 3 µm at room-temperature. Using an adhesive layer and a Sn content of 11 at.%, GeSn membranes can be transferred without membrane bowing.
ISSN:2575-274X
DOI:10.1109/IPC57732.2023.10360743