Efficient DUV micro-LED and arrays for various applications

In this study, we investigated the electrical and optical performance of AlGaN-based deep ultraviolet (DUV) micro-LEDs. Furthermore, we successfully developed a high-bandwidth solar-blind optical communication system and a maskless lithography system by leveraging the capabilities of the micro-LED a...

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Bibliographic Details
Main Authors: Yu, Huabin, Memon, Muhammad Hunain, Xiao, Shudan, Sun, Haiding
Format: Conference Proceeding
Language:English
Subjects:
Aluminum gallium nitride
Behavioral sciences
deep ultraviolet
Lithography
micro-LED
Optical arrays
optical communication
Optical fiber communication
Photonics
Wide band gap semiconductors
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Summary:In this study, we investigated the electrical and optical performance of AlGaN-based deep ultraviolet (DUV) micro-LEDs. Furthermore, we successfully developed a high-bandwidth solar-blind optical communication system and a maskless lithography system by leveraging the capabilities of the micro-LED and its array.
ISSN:2575-274X
DOI:10.1109/IPC57732.2023.10360775