CMOS image sensor with nano light pillars for optical performance enhancement

We have demonstrated a CMOS image sensor (CIS) with nano-light pillars (NLPs), which is metasurface-like structures, on a 0.8 μm-pixel sensor to enhance quantum efficiency. By employing a unique arrangement of NLPs, the light energy can be selectively directed to specific color pixels based on the d...

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Bibliographic Details
Main Authors: Wang, Chun-Yuan, Huang, Guang-Yu, Yu, Chung-Hsuan, Liu, Hao-Wei, Lu, Yu-Shen, Tsai, Wei-Lung, Kuo, An-Li, Kuo, Shin-Hong, Chen, Han-Son, Chen, Huang-Jen, Wang, Po-Hsiang, Wu, Ching-Chiang, Wu, Ken, Tsai, Hung-Jen
Format: Conference Proceeding
Language:English
Subjects:
CMOS image sensors
Green products
Image color analysis
Image edge detection
Image resolution
Signal to noise ratio
Transfer functions
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Summary:We have demonstrated a CMOS image sensor (CIS) with nano-light pillars (NLPs), which is metasurface-like structures, on a 0.8 μm-pixel sensor to enhance quantum efficiency. By employing a unique arrangement of NLPs, the light energy can be selectively directed to specific color pixels based on the design wavelength. The NLPs improve the quantum efficiency (QE) by 40% and 16% for blue and green, respectively, compared to micro-lens (ML) type of sensors. The luminance signal-to-noise ratio (SNR) improves by +1.16 dB under low-light conditions (20 lux) without compromising color fidelity.
ISSN:2156-017X
DOI:10.1109/IEDM45741.2023.10413692