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A MEMS-Type Ionization Vacuum Sensor With a Wide Measurement Range

The letter presents a MEMS-type ionization vacuum sensor based on electron emission from an on-chip thermionic electron source. The sensor employs a multilayer-stacked structure fabricated by anodic bonding technology, showing overall dimensions of 12\times 12\times3.3 mm3. Because of the efficien...

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Bibliographic Details
Published in:IEEE electron device letters 2024-05, Vol.45 (5), p.909-912
Main Authors: Zhao, Yanqing, Li, Zhiwei, He, Yidan, Mao, Shuyu, Guo, Dengzhu, Wei, Xianlong
Format: Article
Language:English
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Summary:The letter presents a MEMS-type ionization vacuum sensor based on electron emission from an on-chip thermionic electron source. The sensor employs a multilayer-stacked structure fabricated by anodic bonding technology, showing overall dimensions of 12\times 12\times3.3 mm3. Because of the efficient and stable electron emission of an yttrium oxide electron source, the sensor exhibits a wide linear response range from 1\times 10^{-{4}} Pa to 100 Pa with a good repeatability, covering both high and medium vacuum regimes. It provides a new miniature vacuum sensor with a wide measurement range.
ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2024.3382769