Test structure for chemiluminescence measurement in aqueous solutions: initial design

There is an unmet need for on-chip integration of sensitive chemiluminescence sensors due to their extensive use in chemical analysis. This manuscript introduces a novel test structure for ease of opto-electrical integration in microfluidic systems. The MOS-based structure functions as an optical se...

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Bibliographic Details
Main Authors: Moreno-Guerrero, A. A., Dunare, Camelia, Walton, Anthony J., Lomax, Peter, Terry, Jonathan G., Underwood, Ian
Format: Conference Proceeding
Language:English
Subjects:
Chemical analysis
Chemical sensors
Fabrication
Luminol
Microelectronics
MOS tunnelling
on-chip microfluidics
Photodetector
Semiconductor device measurement
System-on-chip
TCAD simulation
Tunneling
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Description
Summary:There is an unmet need for on-chip integration of sensitive chemiluminescence sensors due to their extensive use in chemical analysis. This manuscript introduces a novel test structure for ease of opto-electrical integration in microfluidic systems. The MOS-based structure functions as an optical sensor for Luminol-based analysis and validates the suitability of the semiconductor fabrication process.
ISSN:2158-1029
DOI:10.1109/ICMTS59902.2024.10520697