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Effect of poling voltage on electro-optic response of epitaxial BaTiO3 on Si grown by sputtering
Optical-grade BaTiO 3 has been epitaxially integrated on silicon wafers by off-axis sputtering. We find that for films with in-plane ferroelectric polarization, the as-grown domain structure results in an initially reduced effective electrooptic response that can be "woken up" by sufficien...
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Main Authors: | , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | Optical-grade BaTiO 3 has been epitaxially integrated on silicon wafers by off-axis sputtering. We find that for films with in-plane ferroelectric polarization, the as-grown domain structure results in an initially reduced effective electrooptic response that can be "woken up" by sufficient poling. |
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ISSN: | 1949-209X |
DOI: | 10.1109/SiPhotonics60897.2024.10543821 |