High Throughput Apparatus for Testing of Silicon Nitride Membranes Used in Preparation of Samples for Atmospheric Scanning Electron Microscopy

Bioimaging of living specimens in ultrahigh resolution using atmospheric scanning electron microscopy requires preparation of samples on a substrate of thin silicon nitride membranes. The low scattering properties of the electron beam of such membranes allows for ultra high resolution imaging as wel...

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Bibliographic Details
Main Authors: Kretkowski, Maciej, Hiroyuki, Futamata, Inami, Wataru, Kawata, Yoshimasa
Format: Conference Proceeding
Language:English
Subjects:
atmospheric SEM
bioimaging
Biomembranes
D-EXA
electron beam
Reliability
Scanning electron microscopy
Scattering
Silicon nitride
silicon nitride membrane
Substrates
Throughput
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Summary:Bioimaging of living specimens in ultrahigh resolution using atmospheric scanning electron microscopy requires preparation of samples on a substrate of thin silicon nitride membranes. The low scattering properties of the electron beam of such membranes allows for ultra high resolution imaging as well as purposeful, targeted irradiation of the specimens. For successful operation however, the membrane has to withstand a pressure differential of minimum one atmosphere for extended period of time. This paper presents the development of an efficient apparatus for pressure testing of silicon nitride membranes installed in a standard culture dishes prior to deposition of the specimens on the membrane. The aim of the research is to create a reliable device that uses pressurized nitrogen to quickly and repeatably assess whether the membrane is leak-free and undamaged during the assembly. The system has been designed to be operated effortlessly and efficiently with a single action, lever-operated pressure chamber encompassing the tested sample. The ease of use and intuitive operation of the apparatus allows for high throughput of tested samples and wide differential pressure testing range.
ISSN:2767-7745
DOI:10.1109/ICARA60736.2024.10552999