Silicon-based membrane pressure sensor for inline monitoring of pressure and hermeticity of small-volume bonded packages

Hermetic Packages are of great importance for the recent miniaturization of quantum systems to secure a defined vacuum and gas species. In this work, a silicon membrane pressure sensor based on platinum strain gauge structures to measure the pressure dependent deflection of the membrane is shown. Th...

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Bibliographic Details
Main Authors: Koch, Jannik, Brinkmann, Levin Marten, Kassner, Alexander, Dencker, Folke, Wurz, Marc Christopher
Format: Conference Proceeding
Language:English
Subjects:
Bridges
hermetic packages
hermeticity monitoring
Pressure measurement
pressure sensor
Pressure sensors
Sensitivity
Sensor phenomena and characterization
Silicon
Strain measurement
Online Access:Request full text
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Summary:Hermetic Packages are of great importance for the recent miniaturization of quantum systems to secure a defined vacuum and gas species. In this work, a silicon membrane pressure sensor based on platinum strain gauge structures to measure the pressure dependent deflection of the membrane is shown. The pressure sensors are used for inline monitoring of pressure and hermeticity of small-volume bonded packages. For this purpose, the sensors are fabricated by silicon microtechnology, characterized in a developed calibration setup and finally the pressure monitoring and hermeticity test of bonded packages were carried out.
ISSN:2377-5726
DOI:10.1109/ECTC51529.2024.00040