Very low noise all-niobium DC SQUIDs

All-niobium thin film planar DC SQUIDs have been fabricated, containing submicron tunnel junctions. The fabrication method using photoresist techniques is briefly described. The I c R product of the SQUIDs is 0.3 mV, the inductance 1 nH. They show no changes after repeated thermal cycling or storage...

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Bibliographic Details
Published in:IEEE transactions on magnetics 1981-01, Vol.17 (1), p.858-860
Main Authors: de Waal, V., van den Hamer, P., Mooij, J., Klapwijk, T.
Format: Article
Language:English
Subjects:
Chromium
Energy resolution
Fabrication
Inductance
Niobium
Resists
Semiconductor films
Silicon
SQUIDs
Substrates
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Summary:All-niobium thin film planar DC SQUIDs have been fabricated, containing submicron tunnel junctions. The fabrication method using photoresist techniques is briefly described. The I c R product of the SQUIDs is 0.3 mV, the inductance 1 nH. They show no changes after repeated thermal cycling or storage over extended periods. The best intrinsic energy resolution obtained so far in a flux-locked loop configuration is 4 . 10 -32 J/Hz. The noise power is an order of magnitude higher than predicted from the simple RSJ model calculation.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.1981.1061049