High-temperature continuous terahertz laser discharge at NovoFEL: parameters and applications

A stable point-like thermodynamically-equilibrium plasma with diameter of 1 mm, density of 3 \times 10^{17} \mathrm{cm}^{-3}, and temperature of 4-4.5 \mathrm{eV}(\mathbf{4 6 0 0 0 - 5 2 0 0 0 ~ K}) was obtained in a continuous Kr- N 2 laser discharge at NovoFEL at an average radiation power of less...

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Bibliographic Details
Main Authors: Kubarev, V.V., Shevchenko, O.A., Gorbachev, Ya.V., Sidorov, A.V., Vodopyanov, A.V., Veselov, A.P.
Format: Conference Proceeding
Language:English
Subjects:
Discharges (electric)
Fault location
free electron laser
Laser modes
Laser stability
Lithography
Optics
point-like source of VUV and EVUV radiation
Power lasers
terahertz laser discharge
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Summary:A stable point-like thermodynamically-equilibrium plasma with diameter of 1 mm, density of 3 \times 10^{17} \mathrm{cm}^{-3}, and temperature of 4-4.5 \mathrm{eV}(\mathbf{4 6 0 0 0 - 5 2 0 0 0 ~ K}) was obtained in a continuous Kr- N 2 laser discharge at NovoFEL at an average radiation power of less than 200 W. Such plasma is a bright source of VUV radiation, and when its temperature reaches 10-12 eV, it can be a bright source of EVUV radiation, necessary for modern photolithography.
ISSN:2642-5580
DOI:10.1109/ICLO59702.2024.10624230