Demonstration of On-Chip Switched-Capacitor DC-DC Converters using BEOL Compatible Oxide Power Transistors and Superlattice MIM Capacitors

Through monolithic integration of back- end-of-line (BEOL) compatible enhancement and depletion-mode tungsten-doped indium oxide (IWO) power transistors and high-voltage (HV) superlattice capacitors, we experimentally demonstrate, for the first time, an on-chip switched-capacitor (SC) DC-DC converte...

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Bibliographic Details
Main Authors: Deng, Sunbin, Kwak, Jungyoun, Lee, Junmo, Chakraborty, Dyutimoy, Shin, Jaewon, Phadke, Omkar, Kirtania, Sharadindu Gopal, Zhang, Chengyang, Aabrar, Khandker Akif, Shimeng, Y., Datta, Suman
Format: Conference Proceeding
Language:English
Subjects:
Capacitors
DC-DC power converters
Power system reliability
Power transistors
Superlattices
System-on-chip
Very large scale integration
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Summary:Through monolithic integration of back- end-of-line (BEOL) compatible enhancement and depletion-mode tungsten-doped indium oxide (IWO) power transistors and high-voltage (HV) superlattice capacitors, we experimentally demonstrate, for the first time, an on-chip switched-capacitor (SC) DC-DC converter to support efficient power delivery in heterogeneous integrated circuits. A novel oxygen anneal treatment to the power transistors markedly improved the reliability of the transistors with a >4× reduction in \mathrm{V}_{\text{th}} shift. The fabricated converter circuit achieved 12V-to-6V conversion with an efficiency of 82.8%. A projected power density of 1.03 W/mm 2 could be achieved by transitioning to 3D trench capacitors from current planar form.
ISSN:2158-9682
DOI:10.1109/VLSITechnologyandCir46783.2024.10631422