NOEMS Power Multiplied: A Novel Array-Based Multiplexing Scheme

• Main Authors: Trzpil, Wioletta, Furcatte, Thomas, Lefebvre, Mathis, Gely, Marc, Mendes, Munique Kazar, Masselon, Christophe, Jourdan, Guillaume, Sansa, Marc
• Format: Conference Proceeding
• Language: English
• Subjects: Frequency division multiplexing; Mechanical sensors; Multiplexing; nanoresonators; NOEMS; on-chip photonic multiplexing; Optoelectronic and photonic sensors; optomechanics; photonic integrated circuits; sensor arrays; Sensors; Throughput; Time-frequency analysis; VLSI
• ISSN: 2474-3755
• DOI: 10.1109/NEMS60219.2024.10639883

Nano-Opto-Electromechanical Sensors (NOEMS) have recently emerged as a high-performance alternative to classical MEMS for a variety of sensing applications [1]. Harnessing the high bandwidth of optomechanics for large-scale sensor multiplexing is one of the potential advantages of NOEMS, although it has proven experimentally challenging. This paper reports for the first time the concept and demonstration of a novel multiplexing strategy, enabling high-data-rate mechanical sensing enhanced by photonics. The novelty is based on the use of electro-optic modulators (EOM), which allow isolating the responses linked to each photonic sensor by associating their characteristic wavelength to different spectral bands, while optical detection provides a sensitive and interference-free readout. Compared to other NOEMS multiplexing strategies, this method is distinguished by simplicity, high integration through compatibility with silicon photonic components [2], and flexibility. Finally, we demonstrate that this straightforward multiplexing readout architecture does not degrade the sensing resolution.