Dual silicon microring resonators for carbon dioxide gas sensing

We proposed dual microring resonators with SiO2 and polyhexamethylene biguanide hydrochloride claddings for CO2 sensing with temperature compensation, achieving a simulated sensitivity of 3.6 pm/ppm. Then we fabricated dual microrings and conducted temperature-response measurements.

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Bibliographic Details
Main Authors: Zhang, Hui, Wang, Jiaqi, Ding, Penghao, Ou, Zihao, Xu, Yingqi, Wu, Guoxian, Mao, Zhijian, Li, Xu, Du, Yu, Geng, Youfu, Li, Xuejin, Cheng, Zhenzhou
Format: Conference Proceeding
Language:English
Subjects:
integrated optics
Optical fiber networks
optical gas sensing
Optical resonators
Q-factor
Sensitivity
silicon photonics
Temperature
temperature compensation
Temperature measurement
Temperature sensors
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Description
Summary:We proposed dual microring resonators with SiO2 and polyhexamethylene biguanide hydrochloride claddings for CO2 sensing with temperature compensation, achieving a simulated sensitivity of 3.6 pm/ppm. Then we fabricated dual microrings and conducted temperature-response measurements.
ISSN:2771-3059
DOI:10.1109/ICOCN63276.2024.10648320