Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer

This article presents a glow discharge ion source designed specifically for use in the fully integrated MEMS quadrupole mass spectrometer. The problem that needed to be solved was to design ion source in a form of multi-layer structure from which the ion beam would be extracted and sent towards the...

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Bibliographic Details
Main Author: Szyszka, Piotr
Format: Conference Proceeding
Language:English
Subjects:
Geometry
Instruments
ion source
Ion sources
Limiting
mass spectrometry
MEMS
Micromechanical devices
Spectroscopy
Vacuum technology
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Summary:This article presents a glow discharge ion source designed specifically for use in the fully integrated MEMS quadrupole mass spectrometer. The problem that needed to be solved was to design ion source in a form of multi-layer structure from which the ion beam would be extracted and sent towards the analyzer of the lateral MEMS mass spectrometer. In the course of the work, a number of tests structures with varying complexity were proposed and tested. As expected, the trade-off was observed where successive simplifications of structure geometry may result in limiting operating pressure range and limiting the emitted ion currents. The structure, which is optimal in terms of technology consistency with the proposed mass spectrometer, turned out to be efficient enough to operate in the medium vacuum range (from 2×10 −3 hPa) to high vacuum (below 1×10 -5 hPa), reaching even tens of µA of extracted ion currents.
ISSN:2380-6311
DOI:10.1109/IVNC63480.2024.10652352