Model of magnetically enhanced, capacitive RF discharges

Magnetically enhanced, capacitive RF discharges (called RF magnetrons or MERIE discharges) are playing an increasing role in thin film etching for integrated circuit processing. In these discharges, a weak DC magnetic field is imposed, lying parallel to the powered electrode surface. The authors det...

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Bibliographic Details
Published in:IEEE transactions on plasma science 1991-04, Vol.19 (2), p.189-196
Main Authors: Lieberman, M.A., Lichtenberg, A.J., Savas, S.E.
Format: Article
Language:English
Subjects:
426000 - Engineering- Components, Electron Devices & Circuits- (1990-)
CAPACITANCE
CHARGED PARTICLES
CONSERVATION LAWS
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELECTRODES
ELECTRON TUBES
ELECTRONIC CIRCUITS
ELECTRONIC EQUIPMENT
ELECTRONS
ELEMENTARY PARTICLES
ENERGY
ENERGY TRANSFER
ENGINEERING
ETCHING
Exact sciences and technology
FERMIONS
HIGH-FREQUENCY DISCHARGES
INTEGRATED CIRCUITS
IONS
LEPTONS
MAGNETIC FIELDS
Magnetic films
Magnetic flux
MAGNETRONS
MATHEMATICAL MODELS
MICROELECTRONIC CIRCUITS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
PARTICLES
PHYSICAL PROPERTIES
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
PLASMA SHEATH
PRESSURE DEPENDENCE
Radio frequency
Radiofrequency integrated circuits
RF SYSTEMS
SURFACE FINISHING
Thin film circuits
THIN FILMS
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Description
Summary:Magnetically enhanced, capacitive RF discharges (called RF magnetrons or MERIE discharges) are playing an increasing role in thin film etching for integrated circuit processing. In these discharges, a weak DC magnetic field is imposed, lying parallel to the powered electrode surface. The authors determine the RF power transferred to the discharge electrons by the oscillating electron sheath in the presence of the magnetic field. Using this, along with particle and energy conservation, they obtain discharge parameters such as the ion flux and ion bombarding energy at the powered electrode as functions of pressure, RF power, and the magnetic field. Some results of the model show good agreement with experiments done on a commercial MERIE system.< >
ISSN:0093-3813
1939-9375
DOI:10.1109/27.106813