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Polymer-functionalized on-chip Fabry-Perot interferometer for CO2 and CH4 sensing
An on-chip silicon Fabry-Perot interferometer (FPI) is functionalized with three different polymers to investigate the response to CH 4 and CO 2 . Polyethylene co-vinyl acetate (PEVA) exhibits notable sensitivity to methane at -3.36 × 10 2 pm ppm 1 whereas having no sensitivity to CO 2 .
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Main Authors: | , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | An on-chip silicon Fabry-Perot interferometer (FPI) is functionalized with three different polymers to investigate the response to CH 4 and CO 2 . Polyethylene co-vinyl acetate (PEVA) exhibits notable sensitivity to methane at -3.36 × 10 2 pm ppm 1 whereas having no sensitivity to CO 2 . |
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ISSN: | 2160-5041 |
DOI: | 10.1109/OMN61224.2024.10685237 |