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Polymer-functionalized on-chip Fabry-Perot interferometer for CO2 and CH4 sensing

An on-chip silicon Fabry-Perot interferometer (FPI) is functionalized with three different polymers to investigate the response to CH 4 and CO 2 . Polyethylene co-vinyl acetate (PEVA) exhibits notable sensitivity to methane at -3.36 × 10 2 pm ppm 1 whereas having no sensitivity to CO 2 .

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Bibliographic Details
Main Authors: Guertin, Regis, Bianki, Marc-Antoine, Figueroa, Oceane, Amoah, Cephas, Skene, William, Peter, Yves-Alain
Format: Conference Proceeding
Language:English
Subjects:
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Description
Summary:An on-chip silicon Fabry-Perot interferometer (FPI) is functionalized with three different polymers to investigate the response to CH 4 and CO 2 . Polyethylene co-vinyl acetate (PEVA) exhibits notable sensitivity to methane at -3.36 × 10 2 pm ppm 1 whereas having no sensitivity to CO 2 .
ISSN:2160-5041
DOI:10.1109/OMN61224.2024.10685237