MEMS Rotary Transmissive Grating Enabling Ultra-compact Near-Infrared Laser Scanner

This paper presents a near-infrared (NIR) laser scanner developed using a microelectromechanical system (MEMS). The scanner leverages the transmitted diffraction beam of an in-plane rotational grating, offering notable compactness advantages over conventional reflective grating scanners. Experiment...

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Bibliographic Details
Main Authors: Wu, Junhui, Ni, Zhenwei, Wan, Xinchen, Zhou, Guangya
Format: Conference Proceeding
Language:English
Subjects:
Diffraction
Diffraction gratings
Laser beams
Micromechanical devices
microoptoelectromechanical systems(MOEMS)
Optical modulation
Optical reflection
thermal actuator
transmissive diffraction grating
Voltage
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Summary:This paper presents a near-infrared (NIR) laser scanner developed using a microelectromechanical system (MEMS). The scanner leverages the transmitted diffraction beam of an in-plane rotational grating, offering notable compactness advantages over conventional reflective grating scanners. Experiment results demonstrate that applying 5V DC voltage induces an in-plane rotation angle of 15.8° of the grating. Furthermore, we successfully show the optical scanning of the second-order diffraction of the transmissive grating when driven by AC voltage. The frequency response indicates that the scan angle reduces with increasing driving frequency due to the limited electrothermal modulation speed.
ISSN:2160-5041
DOI:10.1109/OMN61224.2024.10685252