BEOL-Compatible On-Chip DC-DC Converters

We have developed back-end-of-line (BEOL)-compatible on-chip DC-DC converters using amorphous oxide semiconductor (AOS) power transistor technology. Simulation results of these converters have shown a high efficiency of approximately 83%, holding promise for efficient power delivery in heterogeneous...

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Bibliographic Details
Main Authors: Deng, Sunbin, Kwak, Jungyoun, Lee, Junmo, Yu, Shimeng, Datta, Suman
Format: Conference Proceeding
Language:English
Subjects:
amorphous oxide semiconductor
back-end-of-line
DC-DC power converters
Integrated circuit interconnections
on-chip
power transistor
Power transistors
Simulation
System-on-chip
Three-dimensional integrated circuits
Voltage
voltage converter
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Description
Summary:We have developed back-end-of-line (BEOL)-compatible on-chip DC-DC converters using amorphous oxide semiconductor (AOS) power transistor technology. Simulation results of these converters have shown a high efficiency of approximately 83%, holding promise for efficient power delivery in heterogeneous three-dimensional integrated circuits.
ISSN:2380-6338
DOI:10.1109/IITC61274.2024.10732864