Mitigation of mechanical cross-talk in resonant beam accelerometers

Resonant MEMS beam accelerometers have demonstrated remarkable sensitivity and stability, enabling applications in seismology and gravimetry while keeping a small footprint. However, mechanical cross-talk and resonance mode coupling have shown to be specially detrimental to the operation of this kin...

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Bibliographic Details
Published in:IEEE sensors journal 2024-11, p.1-1
Main Authors: Miani, Theo, Verdot, Thierry, Berthelot, Audrey, Maspero, Federico, Koumela, Alexandra, Robert, Philippe, Langfelder, Giacomo, Arcamone, Julien, Sansa, Marc
Format: Article
Language:English
Subjects:
accelerometer
Accelerometers
Couplings
cross-talk
Frequency measurement
Mechanical sensors
MEMS
Micromechanical devices
NEMS
Resonance
Resonant frequency
resonator
Resonators
Sensors
Stress
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Summary:Resonant MEMS beam accelerometers have demonstrated remarkable sensitivity and stability, enabling applications in seismology and gravimetry while keeping a small footprint. However, mechanical cross-talk and resonance mode coupling have shown to be specially detrimental to the operation of this kind of accelerometers, especially when employing nano-resonators as the transduction element. In this study, we investigate the mechanical cross-talk of nanoresonator-based accelerometers, through measurement, modelling and simulation of a pendulum accelerometer. We introduce a novel methodology for the early identification of cross-talk during the accelerometer design phase, facilitating proactive detection and mitigation of this issue. Finally, we propose an innovative technique that effectively minimizes mechanical cross-talk with a minimum impact on performance, applicable to a large number of structures. This involves the mechanical decoupling of vibrational modes within the beam resonator from the rest of the accelerometer structure.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2024.3487230