Temperature-modulated UV-Enhanced SnO2 Gas Sensor Cell with High-Stability and High-Selectivity Gas Discrimination

This article presents a low-power, temperature-modulated gas sensor cell based on tin dioxide, aimed at improving the selectivity of single-material metal oxide gas sensors. This gas sensor cell features hexagonal-structured six channels sharing a heater and six pairs of detecting electrodes sharing...

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Bibliographic Details
Published in:IEEE sensors journal 2024-11, p.1-1
Main Authors: Xing, Chong, Xie, Dongcheng, Zhang, Yan, Zhang, Haochen, Xu, Lei, Wu, Feng
Format: Article
Language:English
Subjects:
Electrodes
Gas detectors
Gas sensor
Gases
Land surface temperature
microelectromechanical system (MEMS)
Modulation
Resistance
Sensors
Silicon
Temperature distribution
temperature modulation
Temperature sensors
UV enhancement
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Summary:This article presents a low-power, temperature-modulated gas sensor cell based on tin dioxide, aimed at improving the selectivity of single-material metal oxide gas sensors. This gas sensor cell features hexagonal-structured six channels sharing a heater and six pairs of detecting electrodes sharing a single ground pad, significantly enhancing device integration. The proposed gas sensor cell employs a coplanar design of the heater and detecting electrodes with differential temperature gradients across six detection channels. By precisely designing the temperature distribution across the active regions of the six channels, the selectivity of the tin dioxide sensor cell is greatly enhanced. Furthermore, periodic ultraviolet (UV) light illumination improves the sensor's response speed and achieves gas discrimination by analysis of the sensitivities instead of whole curves. With the trend towards highly integrated micro-electro-mechanical systems sensors, temperature modulation and UV enhancement hold promise for portable sensor monitoring.
ISSN:1530-437X
DOI:10.1109/JSEN.2024.3491860