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Analysis of Piezoresistive Silicon as Sense Element for use in Flexible Tactile Sensors

This paper presents the bending analysis of stress-sensor chips of 300 µm and 100 µm thickness. Previous work on similar topics is usually heavily focused on ultra-thin chips (≤20 µm) and their reliability analysis for flexible applications. This paper aims to prove that flexible tactile sensors can...

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Main Authors:	Verma, Vartika, Ahmed, Eslam, Kovac, Nicola, Landesberger, Christof, Gieser, Horst, Brederlow, Ralf
Format:	Conference Proceeding
Language:	English
Subjects:	chip-on-foil (CoF) Circuits CMOS Stress sensor flexible electronics hybrid integration Piezoresistance piezoresistive sensor Reliability Resistors Sensitivity Sensors Silicon Stress Tactile sensors Temperature sensors
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creator	Verma, Vartika Ahmed, Eslam Kovac, Nicola Landesberger, Christof Gieser, Horst Brederlow, Ralf
description	This paper presents the bending analysis of stress-sensor chips of 300 µm and 100 µm thickness. Previous work on similar topics is usually heavily focused on ultra-thin chips (≤20 µm) and their reliability analysis for flexible applications. This paper aims to prove that flexible tactile sensors can be made using silicon resistors as the primary stress elements and can demonstrate good results even at intermediate thickness levels. The silicon resistors show a linear temperature response and can be oriented to have directional stress sensitivity, proving superior to other organic sensors. The motivation behind this research is to make the tactile sensor solely using CMOS circuits and, therefore, integrate both the sensor and the readout circuitry in one chip. This is extremely useful if the tactile sensors are used on a large scale and must be fabricated commercially using existing infrastructure.
doi_str_mv	10.1109/SENSORS60989.2024.10785001
format	conference_proceeding
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ispartof	Proceedings of IEEE Sensors ..., 2024, p.1-4
issn	2168-9229
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recordid	cdi_ieee_primary_10785001
source	IEEE Xplore All Conference Series
subjects	chip-on-foil (CoF) Circuits CMOS Stress sensor flexible electronics hybrid integration Piezoresistance piezoresistive sensor Reliability Resistors Sensitivity Sensors Silicon Stress Tactile sensors Temperature sensors
title	Analysis of Piezoresistive Silicon as Sense Element for use in Flexible Tactile Sensors
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