Single-Step Laser Fabrication of 3D Free-Standing Origami MEMS Thermal Sensor

This paper presents a facile fabrication approach for micro-electro-mechanical systems (MEMS) thermal sensors, utilizing laser ablation and origami techniques to create a 3D free-standing structure. A single-step fabrication for a micromachined metal structure was demonstrated using a fiber laser. T...

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Bibliographic Details
Main Authors: Mohamed Zukri, Mohammad Nizar, Al Farisi, Muhammad Salman, Hasegawa, Yoshihiro, Shikida, Mitsuhiro
Format: Conference Proceeding
Language:English
Subjects:
Fabrication
Fiber lasers
free-standing structure
Infrared imaging
Laser ablation
MEMS fabrication
Micromechanical devices
origami
Periodic structures
Thermal analysis
thermal sensor
Thermal sensors
Three-dimensional displays
Voltage
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Summary:This paper presents a facile fabrication approach for micro-electro-mechanical systems (MEMS) thermal sensors, utilizing laser ablation and origami techniques to create a 3D free-standing structure. A single-step fabrication for a micromachined metal structure was demonstrated using a fiber laser. Thin nichrome sensing structures as small as 45.1 ¼m width were fabricated, with an electrical resistance of up to 6 Ω and a TCR of 390.39 ppm/°C. Thermal analysis via infrared thermography revealed that the free-standing structure exhibits a diminished thermal mass. The voltage response for airflow demonstrates the sensing ability of the fabricated structure, showcasing its potential for airflow sensing applications.
ISSN:2168-9229
DOI:10.1109/SENSORS60989.2024.10785084