High-performance and Low-power VOCs Monitoring System with Temperature and UV Light Modulation Enhanced MEMS Gas Sensors

• Main Authors: Zhu, Jiaqing, Wang, Tao, Ni, Wangze, Li, Zhuoheng, Cheng, Weiwei, Chen, Lechen, Ma, Xinan, Yang, Zhi, Yang, Jianhua, Xu, Shusheng, Zhang, Bowei, Xuan, Fuzhen
• Format: Conference Proceeding
• Language: English
• Subjects: Energy consumption; Gas detectors; Low-power consumption; MEMS gas sensor; Micromechanical devices; Mobile handsets; Monitoring; Optical sensors; Real-time systems; Temperature measurement; Temperature modulation; Temperature sensors; UV activation; VOCs monitoring; Wireless communication
• ISSN: 2168-9229
• DOI: 10.1109/SENSORS60989.2024.10785162

As the demand for air quality detection increases, there is a pressing need for performance improvement and operational efficiency in gas detection. A high-performance volatile organic compounds (VOCs) monitoring system has been developed, which integrates homemade MEMS sensors with ultraviolet (UV) micro-LEDs, allowing for the modulation of both the operating temperature and light source intensity. Furthermore, the Bluetooth Low Energy module enables wireless communication with mobile phones, allowing for real-time data acquisition under multifunctional conditions. A combination of temperature and UV light co-modulation can significantly enhance sensor response performance while reducing operating temperature (from 300°C to 100 °C) and energy consumption (less than 1/6 of the original). Our work presents novel insights and methodologies for constructing high-performance, low-power VOCs sensing systems.