A 3.6 GHz Radio Frequency Circulator based on AlN FBAR Filters

In this study, a 3.6 GHz magnetic-free radio frequency (RF) circulator based on aluminum nitride (AlN) film bulk acoustic wave resonator (FBAR) filters is implemented using spatiotemporal modulation. The circulator is designed at the board level with two identical filters in a sequentially-switched...

Full description

Saved in:
Bibliographic Details
Main Authors: Chang, Chin-Yu, Yu, Ya-Ching, Hung, Yu-Chi, Chen, Yung-Hsiang, Pradeep, Yelehanka Ramachandramurthy, Chand, Rakesh, Ho, Yens, Fang, Weileun, Li, Sheng-Shian, Li, Ming-Huang
Format: Conference Proceeding
Language:English
Subjects:
AlN
Aluminum nitride
Bandwidth
circulator
Circulators
FBAR
Film bulk acoustic resonators
Filters
III-V semiconductor materials
Insertion loss
Magnetoacoustic effects
Radio frequency
Spatiotemporal phenomena
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this study, a 3.6 GHz magnetic-free radio frequency (RF) circulator based on aluminum nitride (AlN) film bulk acoustic wave resonator (FBAR) filters is implemented using spatiotemporal modulation. The circulator is designed at the board level with two identical filters in a sequentially-switched delay element topology, creating nonreciprocity through two external switch modules. The FBAR filters, which exhibit an insertion loss (IL) of 1.3 dB and a fractional bandwidth (FBW) of 61 MHz at 3.64 GHz, are fabricated using a 200 mm commercial AlN-MEMS platform fully compatible with RF CMOS processes. The circulator achieves a moderate IL of 11.6 dB, high isolation (IX) of 30 dB, low intermodulation distortion (IMD) of 24.6 dB, and a high input third-order intercept point (IIP3) of +42 dBm, over a 20-dB isolation bandwidth of 49.9 MHz (1.38%) with a low modulation frequency of 15 MHz.
ISSN:2375-0448
DOI:10.1109/UFFC-JS60046.2024.10793651